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Nano

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Nano
Low Pressure Plasma Systems (Plasmacleaner)
저압 플라즈마 시스템(플라스마클라너)
The Nano plasma systems can be combined in different variants in a modular manner.

Below, please find an overview over the most common options using the Nano plasma systems.

Nano plasma systems are primarily used in the following sectors:
Analytics, archaeology, automotive, research and development departments, semiconductor
technology, small-series manufacture, plastics technology, medical engineering, micro-system
engineering, sensory technology, sterilising, textile technology

나노 플라스마 시스템은 모듈 방식으로 다양한 변형으로 결합될 수 있다. 아래에서 Nano Plasma 시스템을 사용하는 가장 일반적인 옵션에 대한 개요를 확인하십시오. 나노 플라스마 시스템은 주로 다음과 같은 분야에서 사용된다. 분석, 고고학, 자동차, 연구 개발 부서, 반도체 기술, 소형 시리즈 제조, 플라스틱 기술, 의료 엔지니어링, 마이크로 시스템 엔지니어링, 감지 기술, 살균, 섬유 기술
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Nano
Low pressure plasma systems
for plasma cleaning, activation, etching and coating






Possibilities Of Plasma Treatment



 

 

 

Materials cleaning
Activation of materials
Etching materials
Coating of materials

Plasma technology offers
solutions for any type of contamination,
for any substrate and any post-treatment.
In the process, molecular contamination
residues are decomposed as well.

Good wettability is a prerequisite for
the adhesion of binding partners
in painting, gluing, printing or bonding.

Plasma technology allows for anisotropic
and isotropic etching. Isotropic etching
is done by chemical etching and
anisotropic etching by physical etching.

With low-pressure plasmas, components
can be tempered with various coats.
This is done by supplying gaseous
and liquid starting substances
into the vacuum chamber.













Technical data



Cabinets

Tabel top Width approx. 560 mm (22“)
Depth approx. 600 mm (23.6“)
(570 - 750 mm (22.4“ - 29.5“) incl. plugs)
Height approx. 600 - 860 mm (23.6“ - 33.9“)
Stand alone
Width approx. 600 mm (23.6“)
(750 mm (29.5“) incl. plugs)
Depth approx. 800 mm (31.5“)
Height approx. 1700 mm (66.9“)




Control

Semi Automatic
PCCE-control (Microsoft Windows CE)
PC-control (Microsoft Windows POS Ready 2009)
Rotary switch control




Generator Frequency

100 kHz Power 500 W
80 kHz Power 1000 W
13,56 MHz Power 0 - 100 W; 0 - 300 W
2,45 GHz Power 0 - 600 W
All generators are continuously adjustable
from 0 - 100 %




Charge

Products carrier (optionally, water-cooled), quartz glass boats,
powder rotary drum, bulk goods rotary drum, aluminium panel,
stainless steel, borosilicate glass, quartz glass




Additional options

Spare parts kit, pressure gauge, corrosive gas design,
gas bottles,pressure reducer, heater plate, temperature
display, heatable chamber,Faraday cage, plasma polymerisation
accessories, test inks, oxygen generator, slow ventilation,
slow pump-off, TEM sample holder flange, maintenance/service,
documentation in local language, installation on site incl.
training. Further options available on request.




Gas supply

Needle valves
Mass flow controllers (MFCs)
Vacuum chambers

Stainless steel
Round with cover
Ø 267 mm (10.5“), L 420 mm (16.5“) or 600 mm (23.6“)
Rectangular with hinged door
W 240 mm (9.4“), H 240 mm (9.4“), D 420 mm (16.5“)
or 600 mm (23.6“)
Aluminium
Round with hinged door
Ø 240 mm (9.4“) x 240 mm (9.4“), L 420 mm (16.5“) or
600 mm (23.6“)
Quarzglas (UHP)
Round with cover or with hinged door
Ø 230 mm (9.4“), L 400 mm (15.7“) or 600 mm (23.6“)
Borosilikatglas (UHP)
Round with cover or with hinged door
Ø 230 mm (9.4“), L 400 mm (15.7“) or 600 mm (23.6“))




Chamber volume

Approx. 18 - 36 Litres




Power supply

230 V AC for tabel top system
400 V AC/ 3 phases for stand alone system




Electrodes

Single- or multi-tier
RIE




Pressure measurement

Pirani
Capacity pressure gauge (for corrosive gas version)




Timer

Digital




Vacuum pumps

In different sizes and from different manufacturers
(if required with activated carbon filter)









Nano detail view


 


 

Front view
Back view








Nano video







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배송 방법 : 택배
배송 지역 : 전국지역
배송 비용 : 2,500원
배송 기간 : 3일 ~ 7일
배송 안내 :


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